MicroProf® 200 TTV MHU

MicroProf-FRT-MHU_150.jpgThe MicroProf® 200 can likewise be retrofitted on site at the customer's premises with a complete wafer handling module for automatic loading (MHU). Complete integration into the production workflow with full automation, achievable on site by retrofitting of the surface metrology tool. FRT offers all wafer manufacturers and the processing industry the instrument to monitor the production parameters and to increase the quality significantly. Therefore throughput and yield can be increased

Каталог приборов для трехмерного контроля поверхности FRT (Германия)